Semiconductor devices and methods of fabricating the same

ABSTRACT

A semiconductor device includes a plurality of first insulating layers and a plurality of second layers alternately and vertically stacked on a substrate. Each of the plurality of second layers includes a horizontal electrode horizontally separated by a second insulating layer. A contact plug penetrates the plurality of first insulating layers and the second insulating layer of the plurality of second layers.

CROSS-REFERENCE TO RELATED APPLICATION

This application claims priority under 35 U.S.C. §119 to Korean PatentApplication No. 10-2012-0075595, filed on Jul. 11, 2012, in the KoreanIntellectual Property Office, the disclosure of which is incorporated byreference herein in its entirety.

TECHNICAL FILED

The present inventive concepts relates to a semiconductor device, moreparticularly, to a vertical-type semiconductor device and a method ofmanufacturing the same.

DISCLOSURE OF RELATED ART

To satisfy excellent performance and low cost, semiconductor deviceshave been highly integrated. A density of integration in memory devicesis an important factor in determining the prices of products. In typicalTwo-Dimensional (2D) memory devices, a density of integration is mainlydetermined by the occupied area of memory cells, which is affected bythe level of fine pattern forming technology. However, this fine patternforming technology, performed by high-cost equipments, may limit adensity of integration in 2D semiconductor memory devices.

To overcome these limitations, three-dimensional (3D) memory devicesincluding memory cells three-dimensionally arranged have been proposed.For mass production of the 3D memory devices, however, a processtechnology which reduces manufacturing costs per bit relative to 2Dmemory devices and secures reliable product characteristics is required.

SUMMARY

According to an exemplary embodiment of the present inventive concept, asemiconductor device includes a plurality of horizontal electrodesvertically stacked on a substrate. A plurality of first insulatinglayers each is disposed between a corresponding pair of the plurality ofhorizontal electrodes. A plurality of second insulating layers each isdisposed between a corresponding pair of the plurality of firstinsulating layers and is disposed at the same vertical level as acorresponding one of the plurality of horizontal electrodes. A contactstructure penetrates the first and second insulating layers. The contactstructure is in contact with the first insulating layers and the secondinsulating layers.

According to an exemplary embodiment of the present inventive concept, asemiconductor device includes a stack structure disposed on a substrate.The stack structure includes four or more first insulating layers andfour or more second insulating layers sequentially stacked one over theother. A contact structure penetrates the stack structure. Four or morehorizontal electrodes are extended between the first insulating layers.The first insulating layers and the second insulating layers are incontact with the contact structure. The first insulating layers includedifferent materials from the second insulating layers.

According to an exemplary embodiment of the present inventive concept, aplurality of first insulating layers and a plurality of secondinsulating layers are alternately stacked on a substrate. Spaces areformed between the plurality of second insulating layers by partiallyetching the plurality of second insulating layers. The spaces aredefined by the plurality of first insulating layers and remainingportions of the plurality of second insulating layers. Horizontalelectrodes are disposed in the spaces. A contact structure penetratesthe plurality of first insulating layers and the remaining portions ofthe plurality of second insulating layers.

According to an exemplary embodiment of the inventive concept, asemiconductor device includes a plurality of first insulating layers anda plurality of second layers alternately and vertically stacked on asubstrate. Each of the plurality of second layers includes a horizontalelectrode horizontally separated by a second insulating layer. A contactplug penetrates the plurality of first insulating layers and the secondinsulating layer of the plurality of second layers.

BRIEF DESCRIPTION OF THE DRAWINGS

These and other features of the inventive concept will become moreapparent by describing in detail exemplary embodiments thereof withreference to the accompanying drawings of which:

FIG. 1 is a block diagram illustrating a semiconductor device accordingto an exemplary embodiment of the inventive concept;

FIG. 2 is a block diagram schematically illustrating a memory cell arrayof FIG. 1.

FIG. 3 is a plan view illustrating a semiconductor device and a methodof fabricating the same, according to an exemplary embodiment of theinventive concept.

FIGS. 4 through 11 are sectional views taken along lines A-A′ and B-B′of FIG. 3.

FIG. 12 is a plan view illustrating a semiconductor device and a methodof fabricating the same, according to an exemplary embodiment of theinventive concept.

FIG. 13 is a sectional view taken along lines A-A′ and B-B′ of FIG. 12.

FIG. 14 is a plan view illustrating a semiconductor device and a methodof fabricating the same, according to an exemplary embodiment of theinventive concept.

FIG. 15 is a sectional view taken along lines A-A′ and B-B′ of FIG. 14.

FIGS. 16 through 19 are plan views illustrating a process of formingresidual insulating layers, according to some exemplary embodiments ofthe inventive concept.

FIGS. 20 through 21 are plan views illustrating a process of formingresidual insulating layers, according to an exemplary embodiment of theinventive concept.

FIG. 22 is a plan view illustrating a semiconductor device and a methodof fabricating the same, according to an exemplary embodiment of theinventive concept.

FIGS. 23 through 25 are sectional views taken along lines A-A′ and B-B′of FIG. 22.

FIGS. 26 and 27 are sectional views illustrating a process of forming afirst conductive region according to an exemplary embodiment of theinventive concept, taken along lines A-A′ and B-B′ of FIG. 3.

FIGS. 28 and 29 are sectional views illustrating a process of forming afirst conductive region according to an exemplary embodiment of theinventive concept, taken along lines A-A′ and B-B′ of FIG. 3.

FIGS. 30A through 30D are sectional views illustrating memory elementsaccording to some exemplary embodiments of the inventive concept.

FIGS. 31A through 31D are sectional views illustrating memory elementsaccording to exemplary embodiments of the inventive concept.

FIG. 32 is a plan view illustrating an example of interconnectionbetween conductive lines, according to an exemplary embodiment of theinventive concept.

FIGS. 33 and 35 are sectional views taken along a line A-A′ of FIG. 32,and FIGS. 34 and 36 are sectional views taken along a line B-B′ of FIG.32.

FIG. 37 is a plan view illustrating an example of interconnectionbetween conductive lines, according to an exemplary embodiment of theinventive concept.

FIGS. 38 and 40 are sectional views taken along a line A-A′ of FIG. 37,and FIGS. 39 and 41 are sectional views taken along a line B-B′ of FIG.37.

FIGS. 42 and 43 are plan views illustrating examples of interconnectionbetween conductive lines, according to exemplary embodiments of theinventive concept.

FIG. 44 is a plan view illustrating a memory cell region and a padcontact region, according to an exemplary embodiment of the inventiveconcept.

FIG. 45 is a sectional view taken along a line C-C of FIG. 44.

FIGS. 46 and 47 are sectional views illustrating a process of forming apad contact region and a peripheral circuit region, according to anexemplary embodiment of the inventive concept.

FIG. 48 is a schematic block diagram illustrating an example of memorysystems including a semiconductor device according to an exemplaryembodiment of the inventive concept.

FIG. 49 is a schematic block diagram illustrating an example of memorycards including a semiconductor device according to an exemplaryembodiment of the inventive concept.

FIG. 50 is a schematic block diagram illustrating an example ofinformation processing systems including a semiconductor deviceaccording to an exemplary embodiment of the inventive concept.

DETAILED DESCRIPTION

Exemplary embodiments of the inventive concepts will be described belowin more detail with reference to the accompanying drawings. Theinventive concepts may, however, be embodied in different forms andshould not be construed as limited to the embodiments set forth herein;rather, these exemplary embodiments are provided so that this disclosurewill be thorough and complete, and will fully convey the concept ofexample embodiments to those of ordinary skill in the art. In thedrawings, the thicknesses of layers and regions are exaggerated forclarity. Like reference numerals denote like elements throughout thespecification and drawings, and thus their description will be omitted.

It will be understood that when an element is referred to as being“connected” or “coupled” to another element, it may be directlyconnected or coupled to the other element or intervening elements may bepresent. In contrast, when an element is referred to as being “directlyconnected” or “directly coupled” to another element, there are nointervening elements present. As used herein the term “and/or” includesany and all combinations of one or more of the associated listed items.Other words used to describe the relationship between elements or layersshould be interpreted in a like fashion (e.g., “between” versus“directly between,” “adjacent” versus “directly adjacent,” “on” versus“directly on”).

It will be understood that, although the terms “first”, “second”, etc.may be used herein to describe various elements, components, regions,layers and/or sections, these elements, components, regions, layersand/or sections should not be limited by these terms. These terms areonly used to distinguish one element, component, region, layer orsection from another element, component, region, layer or section. Thus,a first element, component, region, layer or section discussed belowcould be termed a second element, component, region, layer or sectionwithout departing from the teachings of example embodiments.

Spatially relative terms, such as “beneath,” “below,” “lower,” “above,”“upper” and the like, may be used herein for ease of description todescribe one element or feature's relationship to another element(s) orfeature(s) as illustrated in the figures. It will be understood that thespatially relative terms are intended to encompass differentorientations of the device in use or operation in addition to theorientation depicted in the figures. For example, if the device in thefigures is turned over, elements described as “below” or “beneath” otherelements or features would then be oriented “above” the other elementsor features. Thus, the exemplary term “below” may encompass both anorientation of above and below. The device may be otherwise oriented(rotated 90 degrees or at other orientations) and the spatially relativedescriptors used herein interpreted accordingly.

The terminology used herein is for the purpose of describing particularembodiments only and is not intended to be limiting of exampleembodiments. As used herein, the singular forms “a,” “an” and “the” areintended to include the plural forms as well, unless the context clearlyindicates otherwise. It will be further understood that the terms“comprises”, “comprising”, “includes” and/or “including,” if usedherein, specify the presence of stated features, integers, steps,operations, elements and/or components, but do not preclude the presenceor addition of one or more other features, integers, steps, operations,elements, components and/or groups thereof.

Example embodiments of the inventive concept are described herein withreference to cross-sectional illustrations that are schematicillustrations of idealized embodiments (and intermediate structures) ofexemplary embodiments. As such, variations from the shapes of theillustrations as a result, for example, of manufacturing techniquesand/or tolerances, are to be expected. Thus, exemplary embodiments ofthe inventive concepts should not be construed as limited to theparticular shapes of regions illustrated herein but are to includedeviations in shapes that result, for example, from manufacturing. Forexample, an implanted region illustrated as a rectangle may have roundedor curved features and/or a gradient of implant concentration at itsedges rather than a binary change from implanted to non-implantedregion. Likewise, a buried region formed by implantation may result insome implantation in the region between the buried region and thesurface through which the implantation takes place. Thus, the regionsillustrated in the figures are schematic in nature and their shapes arenot intended to illustrate the actual shape of a region of a device andare not intended to limit the scope of example embodiments.

Unless otherwise defined, all terms (including technical and scientificterms) used herein have the same meaning as commonly understood by oneof ordinary skill in the art to which example embodiments of theinventive concepts belong. It will be further understood that terms,such as those defined in commonly-used dictionaries, should beinterpreted as having a meaning that is consistent with their meaning inthe context of the relevant art and will not be interpreted in anidealized or overly formal sense unless expressly so defined herein.

FIG. 1 is a block diagram illustrating a semiconductor device accordingto an exemplary embodiment of the inventive concept. Referring to FIG.1, a nonvolatile memory device according to an exemplary embodiment ofthe inventive concept includes a memory cell array 10, an addressdecoder 20, a read/write circuit 30, a data input/output circuit 40, anda control logic 50.

The memory cell array 10 is connected to the address decoder 20 througha plurality of word lines WL, and be connected to the read/write circuit30 through a plurality of bit lines BL. The memory cell array 10includes a plurality of memory cells (not shown). The memory cell array10 may store one or more bits in each cell.

The address decoder 20 is connected to the memory cell array 10 throughthe word lines WL. The address decoder 20 operates according to thecontrol of the control logic 50. The address decoder 20 may receive anaddress ADDR from the outside. The address decoder 20 decodes a rowaddress among the received address ADDR to select a corresponding wordline from among the word lines WL. Also, the address decoder 20 decodesa column address among the address ADDR and transfers the decoded columnaddress to the read/write circuit 30. For example, the address decoder20 may include elements such as a row decoder, a column decoder and anaddress buffer.

The read/write circuit 30 is connected to the memory cell array 10through the bit line BL. The read/write circuit 30 may be connected tothe data input/output circuit 40 through the data lines DL. Theread/write circuit 30 may operate according to the control of thecontrol logic 50. In response to the control, the read/write circuit 30receives the decoded column address from the address decoder 20, andselects a bit line BL using the decoded column address. For example, theread/write circuit 30 receives data from the data input/output circuit40 and writes the received data in the memory cell array 10. Theread/write circuit 30 reads data from the memory cell array 10 andtransfers the read data to the data input/output circuit 40. Theread/write circuit 30 reads data from a first storage region (not shown)of the memory cell array 10, and writes the read data in a secondstorage region (not shown) of the memory cell array 10. For example, theread/write circuit 30 may perform a copy-back operation.

The read/write circuit 30 may include elements which include a pagebuffer (not shown) or a page register (not shown) and a column selectioncircuit (not shown). As another example, the read/write circuit 30 mayinclude elements which include a sensing amplifier, a write driver and acolumn selection circuit.

The data input/output circuit 40 is connected to the read/write circuit30 through the data lines DL. The data input/output circuit 40 operatesaccording to the control of the control logic 50. The data input/outputcircuit 40 exchanges data DATA with the outside. For example, the datainput/output circuit 40 transfers the data DATA to the read/writecircuit 30 through the data lines DL. The data input/output circuit 40outputs the data DATA, which is transferred from the read/write circuit30 through the data lines DL, to the outside. For example, the datainput/output circuit 40 may include a data buffer (not shown).

The control logic 50 is connected to the address decoder 20, theread/write circuit 30 and the data input/output circuit 40. The controllogic 50 controls the operation of a 3D semiconductor device. Thecontrol logic 50 operates in response to a control signal CTRLtransferred from the outside.

FIG. 2 is a block diagram illustrating as an example of the memory cellarray 10 of FIG. 1. Referring to FIG. 2, the memory cell array 10 mayinclude a plurality of memory blocks BLK1 to BLKh. Each of the memoryblocks BLK1 to BLKh may have a vertical 3D structure. For example, theeach of the memory blocks BLK1 to BLKh may include structures that areextended in first to third directions intersecting each other. Forexample, the each of the memory blocks BLK1 to BLKh includes a pluralityof cell strings (not shown) that are extended in the third direction.

A semiconductor device and a method of fabricating the same, accordingto an exemplary embodiment of the inventive concept, will be describedwith reference to FIGS. 3 through 11. FIG. 3 is a plan view illustratinga semiconductor device according to an exemplary embodiment of theinventive concept. FIGS. 4 through 11 are sectional views taken alonglines A-A′ and B-B′ of FIG. 3.

Referring to FIGS. 3 and 4, a substrate 100 is provided. The substrate100 may include a silicon substrate, a germanium substrate, or asilicon-germanium substrate. The substrate 100 may include a dopedregion having a first conductivity type. For example, the firstconductivity type may be a p-type. A first conductive region 101 isprovided in the substrate 100. The first conductive region 101 may beconfigured to apply a specific voltage to the substrate 100. The firstconductive region 101 may be a doped region provided in an upper regionof the substrate 100. For example, the first conductive region 101 mayhave the same conductivity type as the substrate 100 and have a dopingconcentration higher than the substrate 100. For example, the firstconductive region 101 may have a line shape extending along an xdirection. The first conductive region 101 may be formed by an ionimplantation process.

A buffer insulating layer 105 is formed on the substrate 100. The bufferinsulating layer 105 may include a silicon oxide layer. The bufferinsulating layer 105 may be formed using a thermal oxidation process.Second insulating layers 110 and first insulating layers 120 arealternately stacked on the buffer insulating layer 105. According to anexemplary embodiment, the numbers of the first insulating layers 120 andthe second insulating layers 110 may be four or more. For example, apair of the first and second insulating layers 120 and 110 may berepeatedly formed ten or more times. The second insulating layers 110and the first insulating layers 120 may include materials having etchselectivity with respect to each other. For example, when a specificetch recipe is used to etch the second insulating layers 110, the firstinsulating layers 120 may include materials having a much lower etchrate than that of the second insulating layers 110 to the specific etchrecipe. The etch selectivity may be quantitatively expressed in terms ofa ratio of an etch rate of the second insulating layers 110 to that ofthe first insulating layers 120. For example, the second insulatinglayers 110 may include materials having etch selectivity of 1:10 to1:200 (or 1:30 to 1:100) with respect to the first insulating layers120. For example, the second insulating layers 110 may include a siliconnitride layer, a silicon oxynitride layer, and/or a polysilicon layer.The first insulating layers 120 may include a silicon oxide layer. Theinsulating layers 110 and 120 may be formed by a chemical vapordeposition (CVD).

Referring to FIGS. 3 and 5, cell holes 125 are formed through theinsulating layers 110 and 120 to expose the substrate 100 using ananisotropic etching process.

Referring to FIGS. 3 and 6, a semiconductor layer 130 and a gap-fillinsulating layer 140 are sequentially formed to fill each of the cellholes 125. The semiconductor layer 130 may be conformally formed in sucha manner that the cell holes 125 are not completely filled with thesemiconductor layer 130. For example, the semiconductor layer 130 may beformed to conformally cover sidewalls of the insulating layers 110 and120 and a top surface of the substrate 100. The sidewalls of theinsulating layers 110 and 120 and the top surface of the substrate 100define the cell holes 125. The gap-fill insulating layer 140 may beformed to fill the cell holes 125 provided with the semiconductor layer130. The semiconductor layer 130 and the gap-fill insulating layer 140may cover a top surface of an uppermost one of the first insulatinglayers 120. Alternatively, the semiconductor layer 130 may fill the cellholes 125. In such a case, the gap-fill insulating layer 140 need not beprovided.

For example, the semiconductor layer 130 may include a polysilicon layerhaving the first conductivity type. The gap-fill insulating layer 140may include a silicon oxide layer or a silicon oxynitride layer.Alternatively, the semiconductor layer 130 may include a conductivelayer (e.g., a doped semiconductor layer, a metal layer, a conductivemetal nitride layer, a silicide layer), or a nano structure (e.g., acarbon nanotube or a graphene layer). According to an exemplaryembodiment, the semiconductor layer 130 and the gap-fill insulatinglayer 140 may be formed using a chemical vapor deposition process or anatomic layer deposition (ALD) process.

Referring to FIGS. 3 and 7, the semiconductor layer 130, separationregions 126 may be formed to expose the substrate 100 through thegap-fill insulating layer 140, and the insulating layers 110 and 120.The separation regions 126 may be delimited by sidewalls of theinsulating layers 110 and 120 and the top surface of the substrate 100.For example, the separation regions 126 may be formed to have atrench-shaped structure extending along the x direction.

Referring to FIGS. 3 and 8, the second insulating layers 110 exposed bythe separation regions 126 may be partially removed to form recessregions 144. For example, the recess regions 144 may be empty regionsproduced by removing the second insulating layers 110. In the case wherethe second insulating layers 110 include a silicon nitride layer or asilicon oxynitride layer, the formation of the recess regions 144 may beperformed using an etching solution containing a phosphoric acid. Eachof the recess regions 144 may be formed to partially expose a sidewallof the semiconductor layer 130. For example, portions of the secondinsulating layers 110 (hereinafter, referred as to residual insulatinglayers 111) may remain between the first insulating layers 120, evenafter the formation of the recess regions 144. The residual insulatinglayers 111 may be formed to be overlapped with the first conductiveregion 101, in plan view. The formation of the residual insulatinglayers 111 will be described in more detail with reference to FIGS. 16through 21.

Referring to FIGS. 3 and 9, a memory element 135 and horizontalelectrodes PG are formed in the recess regions 144. For example, amemory layer (not shown) and a conductive layer (not shown) may besequentially formed in the recess regions 144 and in the separationregion 126. The memory element 135 and horizontal electrodes PG may beneed by removing portions of the memory layer and the conductive layerlocated in the separation region 126 or at the outside of the recessregions 144. For example, the memory element 135 may include a tunnelinsulating layer (not shown), a charge storing layer (not shown) on thetunnel insulating layer, and a blocking insulating layer (not shown) onthe charge storing layer. Alternatively, the memory element 135 may be avariable resistance pattern. The horizontal electrodes PG are verticallyspaced apart from each other by the first insulating layers 120. Thehorizontal electrodes PG may include a doped silicon layer, a metallayer, a metal silicide layer, and/or a conductive metal nitride layer.The memory element 135 and the horizontal electrodes PG will bedescribed in more detail with reference to FIGS. 30A through 30D andFIGS. 31A through 31D.

Impurity regions 102 are formed in an upper portion of the substrate 100exposed by the separation regions 126. The impurity regions 102 mayinclude a different conductivity type (e.g., a second conductivity typeor n-type) from and having a higher concentration than the substrate100. The impurity regions 102 may be of a line shape extending along thex direction. The impurity regions 102 may serve as common source linesof the semiconductor device.

Referring to FIGS. 3 and 10, separation layers 145 are formed to fillthe separation regions 126. For example, an insulating layer (not shown)may be formed in the separation regions 126 and may be formed on anupper surface of the gap-fill insulating layer 140 of FIG. 9. Forexample, the insulating layer may include a silicon oxide layer and/or asilicon oxynitride layer. A planarization process may be performed toremove the insulating layer (now shown), the gap-fill insulating layer140 of FIG. 9 and the semiconductor layer 130 of FIG. 9. In such a case,the separation layers 145 are left in the separation regions 126 and thegap-fill insulating layer 140 of FIG. 9 is left in the cell holes 125 toform the separation layers 145 and gap-fill insulating patterns 141,respectively. The gap-fill insulating layer 140 of FIG. 9 is localizedin each of the cell holes 125 to form the gap-fill insulating patterns141.

Second conductive regions 132 are formed on the cell pillars PL. Forexample, upper portions of the cell pillars PL may be removed, and adoped polysilicon layer or a metal layer may be deposited. For example,the second conductive regions 132 may include a doped pattern of ann-type semiconductor. The second conductive regions 132 may serve asdrain regions of the semiconductor device. A first interlayeredinsulating layer 114 is formed to cover the second conductive regions132 using a chemical vapor deposition. The first interlayered insulatinglayer 114 may include a silicon oxide layer and/or a silicon oxynitridelayer.

Referring to FIGS. 3 and 11, a contact plug CTS is formed through theresidual insulating layers 111. The contact plug CTS is electricallyconnected to the first conductive region 101 through the firstinterlayered insulating layer 114, the first insulating layers 120, andthe residual insulating layers 111. In an exemplary embodiment, when asemiconductor device may include contact plugs CTS, the contact plugsCTS may be arranged along a direction in which the residual insulatinglayers 111 are extended. For example, the contact plugs CTS may bearranged in the x direction. The contact plug CTS is formed in contacthole 128 and is in contact with the first conductive region 101 exposedby the contact hole 128. The contact hole 128 may be formed by using ananisotropic etching process. The contact plug CTS may include a metallayer, a conductive metal nitride layer, a metal silicide layer, and/ora doped semiconductor layer. In the case where the contact plug CTSincludes metal, a metal silicide layer may be formed between the contactplug CTS and the first conductive region 101.

A semiconductor device according to an exemplary embodiment of theinventive concept will be described with reference to FIGS. 3 and 11.The semiconductor includes the horizontal electrodes PG, the cellpillars PL, and contact plugs CTS. The horizontal electrodes PG aresequentially stacked on the substrate 100. The horizontal electrodes PGare horizontally separated from each other by the separation layers 145and extend along the x direction. The impurity regions 102 are providedin the substrate 100 below the separation layers 145. The impurityregions 102 may include doped regions having a different conductivitytype from the substrate 100. The impurity regions 102 may serve as thecommon source lines of the semiconductor device.

The cell pillars PL are connected to the substrate 100 through thehorizontal electrodes PG. In an exemplary embodiment, the cell pillarsPL include a first row of cell pillars adjacent to the separation layers145 and a second row of cell pillars adjacent to the residual insulatinglayers 111. The memory elements 135 are provided between the cellpillars PL and the horizontal electrodes PG. For example, each of thememory elements 135 may include the tunnel insulating layer, the chargestoring layer on the tunnel insulating layer, and the blockinginsulating layer on the charge storing layer. Alternatively, each of thememory elements 135 may include a variable resistance pattern.

The horizontal electrodes PG are vertically separated from each other bythe first insulating layers 120. The residual insulating layers 111 areprovided between the first insulating layers 120. The residualinsulating layers 111 are located at the same level as the correspondingone of the horizontal electrodes PG. For example, the horizontalelectrodes PG partially fill interlayer regions between the firstinsulating layers, and the residual insulating layers 111 fill theremaining portions of the interlayer regions. Top and bottom surfaces ofthe residual insulating layers 111 are in contact with the firstinsulating layers 120. Each of the residual insulating layers 111 isextended along a direction in which the separation layers 145 areextended. For example, the separation layers 145 may be extended alongthe x direction. The horizontal electrodes PG may include portionsinterposed between the cell pillars PL and the residual insulatinglayers 111. The residual insulating layers 111 may include a materialhaving etch selectivity with respect to the first insulating layers 120.For example, in the case where the first insulating layers 120 include asilicon oxide layer, the residual insulating layers 111 may include asilicon nitride layer, a silicon oxynitride layer, and/or a polysiliconlayer.

The contact plug CTS is connected to the first conductive region 101 ofthe substrate 100 penetrating the first insulating layers 120 and theresidual insulating layers 111. The contact plug CTS is in contact withthe first insulating layers 120 and the residual insulating layers 111.For example, the first conductive region 101 may include a doped regionhaving the same conductivity type as and having a higher concentrationthan the substrate 100. The contact plug CTS is electrically separatedfrom the horizontal electrodes PG by the first insulating layers 120 andthe residual insulating layers 111. In an exemplary embodiment, when thesemiconductor device includes contact plugs CTS, the contact plugs CTSmay be arranged along a direction in which the residual insulatinglayers 111 are extended. For example, the residual insulating layers 111are extended along the x direction. The contact plugs CTS may be spacedapart at a distance that may be greater than that between the cellpillars PL arranged along the x direction.

The number of memory elements 135 may be increased by stacking morelayers on the substrate 100. In such a case, the residual insulatinglayers 111 surrounding the contact plug CTS may eliminate an additionalinsulation layer to isolate the contact plug CTS from the horizontalelectrodes PG. The additional insulating layer may have a thickness thatis necessary to prevent an electrical breakdown of the additionalinsulation layer, and thus this elimination increases integrationdensity of the vertical-type semiconductor memory cells.

According to an exemplary embodiment of the inventive concept, portionsof the second insulating layers 111 remain, and the contact plug CTSpenetrates the remaining portions of the second insulating layers 111.This structure of the contact plug CTS enables to omit a process offorming the additional insulating layer to electrically separate thehorizontal electrodes PG from the contact plug CTS. For example, acontact structure of the semiconductor device may be fabricated using asimplified process without a process step of forming the additionalinsulating layer. Furthermore, this omission of the additionalinsulating layer reduces a size of the contact hole 128 in which thecontact plug CTS is provided, and thus, the semiconductor deviceincreases integration density of memory cells.

A semiconductor device according to an exemplary embodiment of theinventive concept will be described with reference to FIGS. 12 and 13.FIG. 12 is a plan view illustrating semiconductor devices and methods offabricating the same, according to an exemplary embodiment of theinventive concept. FIG. 13 is a sectional view taken along lines A-A′and B-B′ of FIG. 12. The exemplary embodiment of FIGS. 12 and 13 issubstantially similar to that of FIGS. 3 to 11, except for a structureof a contact plug CTS. For the sake of brevity, the elements andfeatures previously shown and described will not be described in muchfurther detail.

A contact plug CTS of FIG. 12 according to an exemplary embodiment isextended along a direction in which the residual insulating layers 111are extended. For example, the residual insulating layers 111 areextended along the x direction, and are formed in a trench 129 exposinga portion of the substrate 100. For example, the contact plug CTSincludes a line-shaped horizontal section extending along the separationlayers 145. The first conductive region 101 is extended along theextending direction of the contact plug CTS and is electricallyconnected to the contact CTS. For example, the trench 129 may be formedusing an anisotropic etching process. The trench 129 may be delimited bysidewalls of the residual insulating layers 111, sidewalls of the firstinsulating layers 120, and the top surface of the substrate 100.

A semiconductor device according to an exemplary embodiment of theinventive concept will be described with reference to FIGS. 14 and 15.FIG. 14 is a plan view illustrating a semiconductor device and a methodof fabricating the same, according to an exemplary embodiment of theinventive concept, and FIG. 15 is a sectional view taken along linesA-A′ and B-B′ of FIG. 14. This exemplary embodiment of FIGS. 14 and 15is substantially similar to that of FIGS. 3 to 11, except for a shape ofthe cell pillars PL and a structural relationship between the cellpillars PL and the horizontal electrodes PG. For the sake of brevity,the elements and features of this example previously shown and describedwill not be described in much further detail.

The cell pillars PL of FIG. 14 are separated from each other by secondgap-fill insulating patterns 142 arranged along the x direction. Each ofthe cell pillars PL has a ‘U’-shaped structure filled with a firstgap-fill insulating pattern 141. Each of the first gap-fill insulatingpatterns 141 has substantially the same width as the corresponding oneof the cell pillars PL and is in contact with the second gap-fillinsulating patterns 142. For example, trenches 127 may be formed,exposing the substrate 100. A semiconductor layer (not shown) and aninsulating layer (not shown) may be formed in the trenches 127 (notshown). Thereafter, the semiconductor layer (not shown) and theinsulating layer (not shown) may be divided along the x direction toform the cell pillars PL. The second gap-fill insulating patterns 142are formed between the cell pillars PL. The second gap-fill insulatingpatterns 142 may include a silicon oxide layer and/or a siliconoxynitride layer.

According to an exemplary embodiment, the horizontal electrodes PG areseparated from the residual insulating layers 111 with the cell pillarsPL interposed therebetween. For example, the residual insulating layers111 and the first insulating layers 120 provided along the sidewall ofthe contact plug CTS are separated from the horizontal electrodes PG bythe cell pillars PL and the second gap-fill insulating patterns 142. Theresidual insulating layers 111 are in contact with the sidewalls of thecell pillars PL.

FIGS. 16 through 19 are plan views illustrating a process of forming theresidual insulating layers 111 according to an exemplary embodiment ofthe inventive concept. For the sake of brevity, the elements andfeatures of this example previously shown and described will not bedescribed in much further detail.

FIG. 16 shows an intermediate step of the process of forming the recessregions described with reference to FIGS. 7 and 8. The first insulatinglayers 120 include first sub-dielectric layers RG1 and secondsub-dielectric layers RG2 separated by the separation regions 126. Thefirst sub-dielectric layers RG1 may have smaller width than the secondsub-dielectric layers RG2. The second insulating layers 110 may beremoved using an etching solution selectively etching the secondinsulating layers 110 with respect to the first insulating layers 120.The etching solution may be supplied through the separation regions 126.As shown in FIG. 17, the etching solution may be flowed into spacesbetween the first insulating layers to etch the second insulating layers110 in a horizontal direction. Arrows in FIG. 17 represent an inflowdirection of the etching solution. The etching solution mayisotropically etch the second insulating layers 110. For example, thesecond insulating layers 110 may be etched to have substantially thesame lateral depth (for example, in the y direction) from the separationregions 126. Further, the cell pillars PL are partially exposed, as theresult of the horizontal etching of the second insulating layers 110.

Referring to FIG. 18, in an intermediate stage of the horizontal etchingprocess, the second insulating layers 110 are completely removed fromregions between the first sub-dielectric layers RG1 having a widthsmaller than the second sub-dielectric layers RG2. By contrast, thesecond insulating layers 110 remain in regions between the secondsub-dielectric layers RG2 having a width greater than the firstsub-dielectric layer. In a final stage of the horizontal etchingprocess, as shown in FIG. 19, the sidewall of all the cell pillars PLare completely exposed, and thus, the second insulating layers 110 areremoved except the residual insulating layer 111. The residualinsulating layers 111 are positioned within a localized region betweentwo arrays of the cell pillars PL. For example, in the case where thefirst and second sub-dielectric layers RG2 have widths of d1 and d2,respectively, a width d3 of the residual insulating layer 111 is equalto a width of d2−2*d1. For example, the width d2 of the secondsub-dielectric layers RG2 may be greater than twice the width d1 of thefirst sub-dielectric layers RG1.

As shown in FIG. 19, the residual insulating layer 111 is interposedbetween a first and a second separation regions 126 _(—) a and 126 _(—)b. For example, the first separation region 126 _(—) a is positionedbetween the RG1 and RG2 at the left to the residual insulating layer111, and the second separation region 126 _(—) b is positioned betweenthe RG1 and RG2 at the right to the residual insulating layer 111. Theresidual insulating layer 111 is interposed between the first and secondseparation regions 126 _(—) a and 126 _(—) b. If the second insulatinglayers are etched at the same lateral etch rate from the separationregions 126 _(—) a and 126 _(—) b, a distance d5 between the firstseparation region 126 _(—) a and the residual insulating layers 111 maybe substantially the same with a distance d6 between the secondseparation region 126 _(—) b and the residual insulating layer 111. Thewidth d3 of the residual insulating layers 111 may be greater than awidth d4 of the separation regions 126.

Alternatively, the horizontal etching process may be stopped at thestage depicted in FIG. 18. In this case, the residual insulating layers111 are penetrated by some of the cell pillars PL, and the subsequentprocesses described above with reference to FIGS. 9 to 11 are performedthereto.

FIGS. 20 through 21 are plan views illustrating a process of forming theresidual insulating layers 111 according to an exemplary embodiment ofthe inventive concept. For the sake of brevity, the elements andfeatures of previously shown and described will not be described in muchfurther detail.

As shown in FIG. 21, the cell pillars includes two kinds of arraysincluding a first array of cell pillars PL1 and a second array of cellpillars PL2. The second array of cell pillars PL2 is shifted by apredetermined distance in the x axis. According to an exemplaryembodiment, the first sub-dielectric layers RG1 includes the first andthe second cell pillars PL1 and PL2, and the second sub-dielectriclayers RG2 includes two first arrays of cell pillars PL1. The two firstarrays of cell pillars PL1 are spaced apart from each other by theresidual insulating layer 111 interposed therebetween.

As shown in FIG. 21, the horizontal etching process may be stopped whenthe second insulating layers 110 disposed between the firstsub-dielectric layers RG1 are completely removed. The cell pillars PLpenetrating the second sub-dielectric layers RG2 may be exposed. In thecase where the first and second sub-dielectric layers RG2 have widths ofd1 and d2, the width d3 of the residual insulating layers 111 may equalto a width of d2−d1.

FIG. 22 is a plan view illustrating semiconductor devices and methods offabricating the same, according to an exemplary embodiment of theinventive concept, and FIGS. 23 through 25 are sectional views takenalong lines A-A′ and B-B′ of FIG. 22. For the sake of brevity, theelements and features of this example that are previously shown anddescribed will not be described in much further detail.

Referring to FIGS. 22 and 23, the impurity region 102 and the firstconductive region 101 are formed in an upper region of the substrate100. The impurity region 102 is commonly connected to the cell pillarsPL spaced apart from each other in both y direction and x direction. Theimpurity region 102 may be formed using an ion implantation process. Inan exemplary embodiment, the impurity region 102 may be formed to have adifferent conductivity type from that of the substrate 100. The firstconductive region 101 is a line-shaped doped region extending along thex direction. In an exemplary embodiment, the first conductive region 101may include the same conductivity type as that of the substrate 100 andmay have an impurity concentration higher than that of the substrate100.

The buffer insulating layer 105 is formed on the substrate 100 providedwith the impurity region 102 and the first conductive region 101. Thefirst insulating layers 120 and the horizontal electrodes PG arealternately stacked on the buffer insulating layer 105. In an exemplaryembodiment, each of the horizontal electrodes PG may include a dopedsemiconductor layer. The memory element 135 is formed in the cell holes125 penetrating the first insulating layers 120 and the horizontalelectrodes PG. The memory element 135 is interposed between sidewalls ofthe cell holes 125 and the cell pillars PL. The cell pillars PL isconnected to the impurity region 102 through the memory element 135. Thesecond conductive regions 132 are formed on the cell pillars PL. Thesecond conductive regions 132 may be formed by partially removing upperportions of the cell pillars PL and depositing a doped polysilicon layeror a metal layer thereon. In an exemplary embodiment, the secondconductive regions 132 may include n-type impurities. The firstinterlayered insulating layer 114 is formed to cover the cell pillarsPL.

The contact hole 128 is formed to expose the substrate 100 through thefirst insulating layers 120 and the horizontal electrodes PG. Forexample, the contact hole 128 is formed to expose side surfaces of thefirst insulating layers 120 and the horizontal electrodes PG. Thecontact hole 128 may be formed by performing an anisotropic etchingprocess. The contacts CTS are formed in the contact holes 128. Thecontacts CTS are connected to the first conductive regions 101,respectively.

Referring to FIGS. 22 and 24, second insulating layers 112 are locallyformed on the side surfaces of the horizontal electrodes PG exposed bythe contact holes 128. The second insulating layers 112 are also formedon the top surface of the substrate 100 exposed by the contact holes128. In an exemplary embodiment, the second insulating layers 112 mayinclude oxide layers, which may be formed by thermally oxidizing theexposed side surfaces of the horizontal electrodes PG.

Referring to FIGS. 22 and 25, the contact plugs CTS are formed in thecontact holes 128. The contact plugs CTS are connected to the firstconductive regions 101, respectively. In an exemplary embodiment, beforethe formation of the contact plugs CTS, an etching process may befurther performed to remove partially the second insulating layers 112and expose the top surface of the first conductive regions 101.

Each of the second insulating layers 112 are formed to surround thecontact plugs CTS. For example, each of the second insulating layers 112may be shaped like a ring being in contact with the contact plugs CTS.The contact plugs CTS are electrically separated from the horizontalelectrodes PG by the second insulating layers 112 and the firstinsulating layers 120.

FIGS. 26 and 27 are sectional views illustrating a process of forming afirst conductive region according to an exemplary embodiment of theinventive concept, taken along lines A-A′ and B-B′ of FIG. 3.

Referring to FIGS. 3 and 26, a first conductive region 103 is fanned onthe top surface of the substrate 100 exposed by the buffer insulatinglayer 105 and a mask layer 107. The first conductive region 103 mayinclude a metal layer and/or a metal silicide layer. In an exemplaryembodiment, the first conductive region 103 is formed to fill a gapregion delimited by the mask layer 107. Alternatively, the firstconductive region 103 may be formed by forming and patterning a metallayer and/or a metal silicide layer on the substrate 100. The firstconductive region 103 includes a line-shaped structure extending alongthe x direction.

Referring to FIGS. 3 and 27, the second insulating layers 110 and thefirst insulating layers 120 are alternately stacked on the resultingstructure provided with the first conductive region 103. In an exemplaryembodiment, the mask layer 107 may be removed before the formation ofthe insulating layers 110 and 120.

The subsequent processes may be performed in the same manner as thosedescribed with reference to FIGS. 5 through 11 and thus further detaildescriptions will be omitted.

FIGS. 28 and 29 are sectional views illustrating a process of forming afirst conductive region according to an exemplary embodiment of theinventive concept, taken along lines A-A′ and B-B′ of FIG. 3.

The first conductive region 101 of FIG. 29 may be formed after theformation of the horizontal electrodes PG. For example, as shown inFIGS. 28 and 29, the first conductive region 101 may be formed by an ionimplantation process, which is performed after the formation of thecontact hole 128 penetrating the residual insulating layers 111 and thefirst insulating layers 120. In the case where the number of the contactholes 128 is two or more, the first conductive region 101 may include aplurality of impurity regions separated from each other and may beformed below the plurality of the contact holes 128, respectively.

FIGS. 30A through 30D are sectional views illustrating memory elementsaccording to exemplary embodiments of the inventive concept.

Referring to FIG. 30A, the memory element 135 includes a blockinginsulating layer 135 c formed on the horizontal electrodes PG, a tunnelinsulating layer 135 a formed on the cell pillars PL and a chargestoring layer 135 b interposed therebetween. The memory element 135 ispartially interposed between the horizontal electrodes PG and the firstinsulating layers 120. The blocking insulating layer 135 c may include ahigh-k dielectric layer, such as an aluminum oxide layer or a hafniumoxide layer. The blocking insulating layer 135 c may include amulti-layered structure including a plurality of layers. The chargestoring layer 135 b may include a charge-trap layer or an insulatinglayer provided with conductive nano particles. For example, thecharge-trap layer may include a silicon nitride layer. The tunnelinsulating layer 135 a may include a silicon oxide layer.

Referring to FIGS. 30B through 30D, unlike that shown in FIG. 30A, atleast a portion of the memory element 135 is partially interposedbetween the first insulating layers 120 and the cell pillars PL.Referring to FIG. 30B, the tunnel insulating layer 135 a is extendedbetween the first insulating layers 120 and the cell pillars PL, and thecharge storing layer 135 b and the blocking insulating layer 135 c areextended between the first insulating layers 120 and the horizontalelectrodes PG. Referring to FIG. 30C, the tunnel insulating layer 135 aand the charge storing layer 135 b are extended between the firstinsulating layers 120 and the cell pillars PL, and the blockinginsulating layer 135 c is extended between the first insulating layers120 and the horizontal electrodes PG. Referring to FIG. 30D, the tunnelinsulating layer 135 a, the charge storing layer 135 b, and the blockinginsulating layer 135 c are extended between the first insulating layers120 and the cell pillars PL.

FIGS. 31A through 31D are sectional views illustrating memory elementsaccording to exemplary embodiments of the inventive concept.

The cell pillars PL may include a conductive material. For example, thecell pillars PL may include a doped semiconductor layer, a metal layer,a conductive metal nitride layer, a silicide layer, and/or a nanostructure (e.g., carbon nanotube or graphene). In an exemplaryembodiment, the memory element 135 may include a variable resistancepattern. The variable resistance pattern may include materials having avariable resistance property. Referring to FIG. 31A, the memory element135 is formed and localized between the horizontal electrodes PG and thecell pillars PL. Referring to FIGS. 31B, the memory element 135 isextended between the first insulating layers 120 and the cell pillars PLand is further extended between the horizontal electrodes PG and thecell pillars PL. Referring to FIGS. 31C, the memory element 135 isformed between the horizontal electrodes PG and the cell pillars PL andis further extended between the first insulating layers 120 and thehorizontal electrodes PG.

The memory element 135 may include a material (for example, aphase-changeable material), whose electric resistance may be changedaccording to thermal energy applied thereto. Thermal energy may begenerated by an electric current passing through an electrode adjacentto the memory element 135. The phase-changeable material may includeantimony (Sb), tellurium (Te), and/or selenium (Se). For example, thephase-changeable material may have the properties of chalcogenideglasses. The material may include tellurium (Te) having about 20 toabout 80 atomic percent concentration, antimony (Sb) having about 5 toabout 50 atomic percent concentration, and germanium (Ge) having theremaining concentration. In addition, the phase-changeable material mayfurther include impurities such as N, O, C, Bi, In, B, Sn, Si, Ti, Al,Ni, Fe, Dy, and/or La. In an exemplary embodiment, the memory element135 may include GeBiTe, InSb, GeSb, and/or GaSb.

The memory element 135 may be configured to have a layered structurewhose electric resistance may be changed according to a spintransferring phenomenon of an electric current flowing through thememory element 135. For example, the memory element 135 may beconfigured to have a layered structure exhibiting a magneto-resistanceproperty and may include at least one ferromagnetic material and/or atleast one antiferromagnetic material.

The memory element 135 may include perovskite compounds or transitionmetal oxides. For example, the memory element 135 may include niobiumoxide, titanium oxide, nickel oxide, zirconium oxide, vanadium oxide,PCMO((Pr,Ca)MnO3), strontium-titanium oxide, barium-strontium-titaniumoxide, strontium-zirconium oxide, barium-zirconium oxide, and/orbarium-strontium-zirconium oxide.

Referring to FIG. 31D, a switching element SW is interposed between thememory element 135 and the horizontal electrodes PG. The switchingelement SW may include a material exhibiting a self-rectifying propertyor a nonlinear current-voltage property. For example, the switchingelement SW may be configured to form a pn-junction diode.

FIG. 32 is a plan view illustrating an example of interconnectionbetween conductive lines, according to an exemplary embodiment of theinventive concept. FIGS. 33 and 35 are sectional views taken along lineA-A′ of FIG. 32, and FIGS. 34 and 36 are sectional views taken alongline B-B′ of FIG. 32.

Referring to FIGS. 32 through 36, bit lines BL_a and BL_b are providedto connect the cell pillars to each other. The cell pillars PL1 and PL2are grouped into cell groups PLG1 and PLG2 separated by the residualinsulating layer 111. Each of the cell groups PLG1 and PLG2 includes thefirst cell pillars PL1 arranged in a first row, extending in the xdirection, adjacent to the separation layers 145 and the second cellpillars PL2 arranged in a second row, extending in the x direction,between the first row and the residual insulating layer 111. Along the xdirection, the second cell pillars PL2 are shifted by a predetermineddistance in the x direction and thus are located between the first cellpillars PL1. The cell groups PLG1 and PLG2 adjacent to each other havesubstantially the same arrangement of the cell pillars PL1 and PL2.Alternatively, the cell groups PLG1 and PLG2 adjacent to each other maybe configured to have a mirror-symmetric arrangement of the cell pillarswith respect to each other. The inventive concepts are not limited to acell group having the two rows of cell pillars PL1 and PL2, but mayinclude a cell group having three or more rows of cell pillars.

A contact connection line SC may serve to connect the contact plugs CTSto each other. The contact connection line SC and the bit lines BL_a andBL_b may include a metal layer and/or a conductive metal nitride layer.The contact connection line SC may be used to apply a predeterminedvoltage to the substrate 100 through the contact plugs CTS and the firstconductive region 101. The contact connection line SC may extend alongthe extending direction (e.g., the x direction) of the residualinsulating layers 111. In an exemplary embodiment, the contactconnection line SC is provided between the bit lines BL_a and BL_b andthe contact plugs CTS. For example, the contact connection line SC isformed on the contact plugs CTS, connecting the contact plugs CTS toeach other. The contact connection line SC is further positioned underthe bit lines BL_a and BL_b. Alternatively, the contact connection lineSC may be provided on the bit lines BL_a and BL_b.

The bit lines BL_a and BL_b cross the separation layers 145 and theresidual insulating layers 111. In an exemplary embodiments, the firstbit lines BL_a does not overlap the contact plugs CTS, and the secondbit lines BL_b overlaps the contact plugs CTS. The first cell pillarsPL1 of the first and second cell groups PLG1 and PLG2 may be connectedto the same first bit line BL a through the first bit line contact plugsCP1.

The cell pillars PL_a overlapped with the second bit lines BL_b are notconnected to the second bit lines BL_b. In an exemplary embodiment, asshown in FIGS. 33 and 34, the second bit lines BL_b is electricallyseparated from the contact connection line SC by a second interlayeredinsulating layer 115. Alternatively, as shown in FIGS. 35 and 36, thesecond bit lines BL_b is electrically connected to the contactconnection line SC via second bit line plugs CP2 penetrating the secondinterlayered insulating layer 115. In this case, the second bit linesBL_b may serve to apply a predetermined voltage to the first conductiveregion 101.

FIG. 37 is a plan view illustrating an example of interconnectionbetween conductive lines, according to an exemplary embodiment of theinventive concept. FIGS. 38 and 40 are sectional views taken along lineA-A′ of FIG. 37, and FIGS. 39 and 41 are sectional views taken alongline B-B′ of FIG. 37. For the sake of brevity, the elements and featuresof this example that are previously shown and described will not bedescribed in much further detail.

According to an exemplary embodiment, the cell pillars PL_a overlappedwith the second bit lines BL_b are connected to the second bit linesBL_b via the third bit line plugs CP3. In an exemplary embodiment, asshown in FIGS. 38 and 39, the second bit lines BL_b is electricallyseparated from the contact connection line SC by the second interlayeredinsulating layer 115. Alternatively, as shown in FIGS. 40 and 41, thesecond bit lines BL_b are electrically connected to the contactconnection line SC via the second bit line plugs CP2 penetrating thesecond interlayered insulating layer 115. In this case, the second bitlines BL_b may serve to apply a predetermined voltage to the substrate100. In addition to the contact plugs CTS, the cell pillars PL_aconnected to the second bit lines BL_b also apply a predeterminedvoltage to the substrate 100.

FIGS. 42 and 43 are plan views illustrating examples of interconnectionbetween conductive lines, according to an exemplary embodiment of theinventive concept. The second bit lines BL_b is connected to the contactplugs CTS via the second bit line plugs CP2, without the contactconnection line SC. The second bit lines BL_b may be electricallyconnected to each other by an additional conductive line (not shown). Asshown in FIG. 42, the cell pillars PL_a overlapped with the second bitlines BL_b are not be connected to the second bit lines BL_b.Alternatively, as shown in FIG. 43, the cell pillars PL_a overlappedwith the second bit lines BL_b are connected to the second bit linesBL_b via the third bit line plugs CP3. In this case, the cell pillarsPL_a connected to the second bit lines BL_b, along with the contactplugs CTS, may serve to apply a predetermined voltage to the substrate100.

FIG. 44 is a plan view illustrating a memory cell region MR and a padcontact region CR, according to an exemplary embodiment of the inventiveconcept, and FIG. 45 is a sectional view taken along line C-C′ of FIG.44.

The formation of the contact plugs CTS and pad contact plugs PCP will bedescribed with reference to FIGS. 44 and 45. The memory cell region MRis a region having the cell pillars PL. The pad contact region CR is aregion having the pad contact plugs PCP. The pad contact plugs PCP areconnected to the horizontal electrodes PG extended from the memory cellregion MR to the pad contact region CR. In the pad contact region CR,the horizontal electrodes PG has an edge having a step-wise structurewhich allows each of the pad contact plugs PCP to be connected tocorresponding horizontal electrodes PG. The pad contact plugs PCP areformed in a third interlayered insulating layer 116 and each of them isconnected to the corresponding one of the horizontal electrodes PGvertically spaced apart from each other. In the case where the two ormore pad contact plugs PCP are connected to one of the horizontalelectrodes PG, the pad contact plugs PCP may be connected to each otherby a global word line GWL.

A process of forming the contact plug CTS may be at least partially usedto form contact plugs in the peripheral circuit region or the padcontact region CR. In an exemplary embodiment, at least one step of theprocess of forming the contact plug CTS may be applied in forming thepad contact plugs PCP. For example, at least one of pad contact holes124, in which the pad contact plugs PCP will be formed, may be formedduring the formation of the contact holes 128. The contact plugs CTS andthe pad contact plugs PCP may be simultaneously formed by forming aconductive layer to fill the contact hole 128 and the pad contact holes124.

FIGS. 46 and 47 are sectional views illustrating a process of formingthe pad contact region CR and the peripheral circuit region PR,according to an exemplary embodiment of the inventive concept.

Referring to FIG. 46, peripheral transistors TR are formed in theperipheral circuit region PR. The peripheral transistors TR are formedon active regions defined by device isolation layers IS. Each of theperipheral transistors TR includes source/drain regions 104 and a gateelectrode GE. A fourth interlayered insulating layer 117 is formed onthe peripheral circuit region PR to cover the peripheral transistors TR.

A first layer stack ST1 is formed on the pad contact region CR. Thefirst layer stack ST1 includes the first insulating layers 120 and thesecond insulating layers 110, which are alternately stacked on thesubstrate 100. In forming the first layer stack ST1, the firstinsulating layers 120 and the second insulating layers 110 are formed tocover the entire top surface of the substrate 100 and then are partiallyremoved from the peripheral circuit region PR to expose the fourthinterlayered insulating layer 117. In removing the first and the secondinsulating layers 120 and 110, a step-wise structure is formed at theedge of the first layer stack ST1 in the pad contact region CR.Thereafter, a fifth interlayered insulating layer 119 is formed to coverthe first layer stack ST1 with the step-wise structure. The fifthinterlayered insulating layer 119 may be formed to expose a top surfaceof the first layer stack ST1.

A second layer stack ST2 is formed on the first layer stack ST1. Thesecond layer stack ST2 covers the pad contact region CR and theperipheral circuit region PR. The second layer stack ST2 includes thefirst insulating layers 120 and the second insulating layers 110, whichare alternately stacked on the substrate 100.

Referring to FIG. 47, the horizontal electrodes PG having the step-wisestructure are formed in the pad contact region CR. In forming thehorizontal electrodes PG having the step-wise structure, the secondlayer stack ST2 is patterned to form the step-wise structure, and then,the second insulating layers 110 is replaced with a conductive layer, asdescribed with reference to FIGS. 8 and 9. In an exemplary embodiment, asixth interlayered insulating layer 118 is formed on the second layerstack ST2 with the step-wise structure.

In exemplary embodiment, in forming the horizontal electrodes PG withthe step-wise structure, the second layer stack ST2 formed on theperipheral circuit region PR is protected and remains in the peripheralcircuit region PR. Thereafter, peripheral circuit contacts CPL is formedin the peripheral circuit region PR to penetrate the second layer stackST2. The peripheral circuit contacts CPL is connected to thesource/drain regions 104 and/or the gate electrodes GE of the peripheraltransistors TR through the first and second insulating layers 120 and110. The second insulating layers 110 of the second layer stack ST2 areprovided between the first insulating layers 120. According to anexemplary embodiment, each of them may be located at substantially thesame level as the corresponding one of the horizontal electrodes PG. Theperipheral circuit contacts CPL are formed to be in contact with thefirst and second insulating layers 120 and 110. Peripheral conductivelines PD are formed on the second layer stack ST2 to connect theperipheral circuit contacts CPL with each other.

The inventive concept is not limited to the embodiments described above,but modifications and changes may be made within the scope of theinventive concept defined in the following claims. For example, thefeatures and configurations of the afore-described embodiments may beexchanged or combined with each other within the scope of the inventiveconcept.

FIG. 48 is a schematic block diagram illustrating an example of memorysystems including a semiconductor device according to an exemplaryembodiment of the inventive concept.

Referring to FIG. 48, an electronic system 1100 according to anexemplary embodiment of the inventive concept includes a controller1110, an input/output (I/O) unit 1120, a memory device 1130, aninterface unit 1140 and a data bus 1150. At least two of the controller1110, the I/O unit 1120, the memory device 1130 and the interface unit1140 may communicate with each other through the data bus 1150. The databus 1150 may correspond to a path through which electrical signals aretransmitted. The memory device 1130 may include a semiconductor deviceaccording to an exemplary embodiment of the inventive concept.

The controller 1110 may include a microprocessor, a digital signalprocessor, a microcontroller or a logic device. The logic device mayhave a similar function to any one of the microprocessor, the digitalsignal processor and the microcontroller. The I/O unit 1120 may includea keypad, a keyboard or a display unit. The memory device 1130 may storedata and/or commands. The memory device 1130 may include a semiconductordevice according to an exemplary embodiment of the present inventiveconcept. The memory device 1130 may further include a different type ofsemiconductor devices from the semiconductor device. The interface unit1140 may transmit electrical data to a communication network or mayreceive electrical data from a communication network. The interface unit1140 may operate in a wireless or cable connection. For example, theinterface unit 1140 may include an antenna for wireless communication ora transceiver for cable communication. Although not shown in thedrawings, the electronic system 1100 may further include a fast DRAM(Dynamic Random Access Memory) device and/or a fast SRAM (Static RandomAccess Memory) device that acts as an operating memory device forimproving an operation of the controller 1110.

The electronic system 1100 may be applied to a lap-top computer, apersonal digital assistant (PDA), a portable computer, a web tablet, awireless phone, a mobile phone, a digital music player, a memory card oran electronic product. The electronic product may be configured toreceive or transmit information data by a wireless communication.

FIG. 49 is a schematic block diagram illustrating an example of memorycards including a semiconductor device according to an exemplaryembodiment of the inventive concept.

Referring to FIG. 49, a memory card 1200 may include a memory device1210.

In an exemplary embodiment, the memory device 1210 may include asemiconductor device according to an exemplary embodiment of theinventive concept. The memory device 1210 may further include adifferent type of semiconductor devices from the semiconductor device.The memory card 1200 includes a memory controller 1220 that controlsdata communication between a host and the memory device 1210. The memorydevice 1210 and/or the controller 1220 may include a semiconductordevice according to an exemplary embodiment of the inventive concept.

The memory controller 1220 includes a processing unit 1222 that controlsoverall operations of the memory card 1200. The memory controller 1220further includes an SRAM device 1221 used as an operation memory of theprocessing unit 1222. The memory controller 1220 further includes a hostinterface unit 1223 and a memory interface unit 1225. The host interfaceunit 1223 may be configured to include a data communication protocolbetween the memory card 1200 and the host. The memory interface unit1225 may connect the memory controller 1220 to the memory device 1210.The memory controller 1220 further includes an error check andcorrection (ECC) block 1224. The ECC block 1224 may detect and correcterrors of data which are read out from the memory device 1210. Althoughnot shown in the drawings, the memory card 1200 may further include aread only memory (ROM) device that stores code data to interface with ahost device. The memory card 1200 may be used as a portable data storagecard. Alternatively, the memory card 1200 may replace hard disks ofcomputer systems as solid state disks (SSD) of the computer systems.

FIG. 50 is a schematic block diagram illustrating an example ofinformation processing systems including a semiconductor deviceaccording to an exemplary embodiment of the inventive concept.

Referring to FIG. 50, an information processing system 1300 includes amemory system 1310 including a semiconductor device according to anexemplary embodiment of the inventive concept. The informationprocessing system 1300 also includes a modem 1320, a central processingunit (CPU) 1330, a RAM 1340, and a user interface 1350, which may beelectrically connected to the memory system 1310 via a system bus 760.The memory system 1310 may be configured to have the same technicalfeatures as the memory system of FIG. 48. Data processed by the CPU 1330and/or input from the outside may be stored in the memory system 1310.Here, the memory system 1310 may be provided as a solid state drive SSD,and thus, the information processing system 1300 may be able to storereliably a large amount of data in the memory system 1310. This increasein reliability enables the memory system 1310 to minimize resources forerror correction and realize a high speed data exchange function.Although not shown in the drawing, it will be apparent to those ofordinary skill in the art that the information processing system 1300may be also configured to include an application chipset, a camera imageprocessor (CIS), and/or an input/output device.

Furthermore, a semiconductor device or memory system according to anexemplary embodiment of the inventive concept may be packaged in variouskinds of ways. For example, the semiconductor device or memory systemmay be employed in a Package on Package (PoP), Ball Grid Array (BGA),Chip Scale Package (CSP), Plastic Leaded Chip Carrier (PLCC), PlasticDual In-line Package (PDIP), Die in Waffle Pack, Die in Wafer Form, ChipOn Board (COB), Ceramic Dual In-line Package (CERDIP), Plastic MetricQuad Flat Pack (MQFP), Thin Quad Flat Pack (TQFP), Small OutlineIntegrated Circuit (SOIC), Shrink Small Outline Package (SSOP), ThinSmall Outline Package (TSOP), System In Package (SIP), Multi ChipPackage (MCP), Wafer-level Fabricated Package (WFP), or Wafer-levelProcessed Stack Package (WSP).

According to exemplary embodiments of the inventive concept, a contactplug structure may be formed without a process of forming an additionalinsulating layer, which may be used to electrically separate contactplugs from other conductive elements. Accordingly, a contact hole may beformed to have a reduced size, and thus, it may increase an integrationdensity of a semiconductor device.

While the present inventive concept has been shown and described withreference to exemplary embodiments thereof, it will be apparent to thoseof ordinary skill in the art that various changes in form and detail maybe made therein without departing from the sprit and scope of theinventive concept as defined by the following claims.

1. A semiconductor device, comprising: a plurality of horizontalelectrodes vertically stacked on a substrate; a plurality of firstinsulating layers, each of which is disposed between a correspondingpair of the plurality of horizontal electrodes; a plurality of secondinsulating layers, each of which is disposed between a correspondingpair of the plurality of first insulating layers and is disposed at thesame vertical level as a corresponding one of the plurality ofhorizontal electrodes; and a contact structure penetrating the first andsecond insulating layers, wherein the contact structure is in contactwith the first insulating layers and the second insulating layers. 2.The device of claim 1, wherein the plurality of second insulating layersis in contact with the corresponding pair of the plurality of firstinsulating layers.
 3. The device of claim 1, wherein the plurality ofsecond insulating layers has etch selectivity with respect to theplurality of first insulating layers.
 4. The device of claim 3, whereinthe plurality of first insulating layers comprises a silicon oxidelayer, and the plurality of second insulating layers comprises a siliconnitride layer, a silicon oxynitride layer, or a polysilicon layer. 5.The device of claim 1, wherein the contact structure comprises a metallayer, a metal silicide layer, or a conductive metal nitride layer. 6.The device of claim 1, further comprising a first conductive regiondisposed in the substrate, wherein the contact structure is connected tothe first conductive region.
 7. The device of claim 6, wherein the firstconductive region has a substantially same conductivity type impurity asthe substrate and an impurity concentration of the first conductiveregion is greater than that of the substrate.
 8. The device of claim 6,wherein the first conductive region is at least one of a metal layer, ametal-metal silicide layer, or a conductive metal nitride layer.
 9. Thedevice of claim 1, wherein the contact structure comprises a pluralityof contact plugs spaced apart from each other and arranged along adirection in which the plurality of second insulating layers isextended.
 10. The device of claim 1, wherein the contact structure islinear-shaped, wherein the contact structure is in contact with thesubstrate and extended along a direction in which the plurality ofsecond insulating layers is extended.
 11. The device of claim 1, furthercomprising a plurality of separation layers penetrating the electrodestructure, wherein the plurality of horizon electrodes are horizontallyseparated between the plurality of separation layers, and wherein theplurality of separation layers are extended along a direction in whichthe plurality of second insulating layers is extend.
 12. The device ofclaim 11, further comprising a plurality of common source lines disposedin the substrate, wherein each of the plurality of common source linesoverlapped with a corresponding one of the plurality of separationlayers.
 13. The device of claim 11, wherein the separation layerscomprise a first separation layer and a second separation layer, whereinthe plurality of second insulating layers is disposed between the firstseparation layer and the second separation layer, and wherein a distancebetween the first separation layer and the second insulating layer is asubstantially same as that of the second separation layer and the secondinsulating layer.
 14. The device of claim 11, wherein the plurality ofseparation layers horizontally divides the plurality of first insulatinglayers into a first plurality of sub-dielectric layers and a secondplurality of sub-dielectric layers, wherein the plurality of secondinsulating layers fills a portion of a region between a correspondingpair of the first plurality of sub-dielectric layers and the pluralityof horizontal electrodes fills a remaining portion of the region. 15.The device of claim 14, wherein a width of the first plurality ofsub-insulating layers is greater than a width of the second plurality ofsub-insulating layers.
 16. The device of claim 1, wherein each of theplurality of second insulating layers has a ring-shaped structuresurrounding a sidewall of the contact structure.
 17. The device of claim1, further comprising: a cell pillar penetrating the plurality ofhorizontal electrodes and the plurality of first insulating layers; anda plurality of memory elements interposed between the cell pillar andthe plurality of horizontal electrodes.
 18. The device of claim 17,wherein the plurality of horizontal electrodes are partially interposedbetween the cell pillar and the plurality of second insulating layers.19. The device of claim 17, wherein the plurality of horizontalelectrodes surrounds a sidewall of the cell pillar.
 20. The device ofclaim 17, further comprising: a contact connection line disposed on thecontact structure, extending along a direction in which the secondinsulating layers are extended, wherein the contact connection line iselectrically connected to the contact structure.
 21. The device of claim20, further comprising: a bit line disposed over and crossing thecontact connection line, wherein the contact connection line iselectrically connected to at least one of the bit lines.
 22. The deviceof claim 20, wherein the cell pillar is disposed below the bit line andis electrically connected to the contact connection line.
 23. The deviceof claim 17, further comprising: a bit line disposed to overlap the cellpillar to extend across the second insulating layer, wherein the contactstructure is electrically connected to the bit line.
 24. The device ofclaim 17, wherein the cell pillar comprise a semiconductor layer, andeach of the plurality of memory elements includes a charge storinglayer, a blocking insulating layer between the charge storing layer andthe horizontal electrode, and a tunnel insulating layer between thecharge storing layer and the semiconductor pillar.
 25. The device ofclaim 17, wherein the cell pillars include a conductive layer, and thememory element is a variable resistance pattern. 26-37. (canceled)38-47. (canceled) 48-52. (canceled)